SEMI F40-0699E(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING
05-07-2021
10-10-2018
Describes component preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components. Also includes preparation procedures that can be applied to components such as tubing, piping, valves, regulators, fittings, gaskets, O-rings, and filter housings.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) E = Editorially modified to correct an error. (03/2006)
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| DocumentType |
Revision
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI C69 : 2015 | TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS |
| SEMI F51 : 2017 | GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY |
| SEMI F57 : 2014 | SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
| SEMI C93 : 2017 | GUIDE FOR DETERMINING THE QUALITY OF ION EXCHANGE RESIN USED IN POLISH APPLICATIONS OF ULTRAPURE WATER SYSTEM |
| SEMI F48 : 2000(R2014) | TEST METHOD FOR DETERMINING TRACE METALS IN POLYMER MATERIALS |
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