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SEMI F57 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS

Superseded date

05-10-2020

Superseded by

SEMI F57 : 2020

Published date

12-01-2013

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Defines minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultra pure water (UPW) in UPW distribution systems.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI F61 : 2017 GUIDE TO DESIGN AND OPERATION OF A SEMICONDUCTOR ULTRAPURE WATER SYSTEM
SEMI C69 : 2015 TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS
SEMI C79 : 2013 GUIDE TO EVALUATE THE EFFICACY OF SUB-15 NM FILTERS USED IN ULTRAPURE WATER (UPW) DISTRIBUTION SYSTEMS
SEMI F39 : 2015 GUIDELINE FOR CHEMICAL BLENDING SYSTEMS
SEMI F75 : 2017 GUIDE FOR QUALITY MONITORING OF ULTRAPURE WATER USED IN SEMICONDUCTOR MANUFACTURING
SEMI F51 : 2017 GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY
SEMI C93 : 2017 GUIDE FOR DETERMINING THE QUALITY OF ION EXCHANGE RESIN USED IN POLISH APPLICATIONS OF ULTRAPURE WATER SYSTEM
SEMI F108 : 2010 GUIDE FOR INTEGRATION OF LIQUID CHEMICAL PIPING COMPONENTS FOR SEMICONDUCTOR, FLAT PANEL DISPLAY, AND SOLAR CELL MANUFACTURING APPLICATIONS
SEMI F41 : 2016 GUIDE FOR QUALIFICATION OF A BULK CHEMICAL DISTRIBUTION SYSTEM USED IN SEMICONDUCTOR PROCESSING
SEMI F104 : 2012 PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS
SEMI C90 : 2015 TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS
SEMI E49.7 : 2004E PURITY GUIDE FOR THE DESIGN AND MANUFACTURE OF ULTRAPURE WATER AND LIQUID CHEMICAL SYSTEMS IN SEMICONDUCTOR PROCESS EQUIPMENT

SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI F40-0699E(R2018) PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING
SEMI F61 : 2017 GUIDE TO DESIGN AND OPERATION OF A SEMICONDUCTOR ULTRAPURE WATER SYSTEM
SEMI F104 : 2012 PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS

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