SEMI F57 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS
Superseded date
05-10-2020
Superseded by
Published date
12-01-2013
Defines minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultra pure water (UPW) in UPW distribution systems.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI F61 : 2017 | GUIDE TO DESIGN AND OPERATION OF A SEMICONDUCTOR ULTRAPURE WATER SYSTEM |
| SEMI C69 : 2015 | TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS |
| SEMI C79 : 2013 | GUIDE TO EVALUATE THE EFFICACY OF SUB-15 NM FILTERS USED IN ULTRAPURE WATER (UPW) DISTRIBUTION SYSTEMS |
| SEMI F39 : 2015 | GUIDELINE FOR CHEMICAL BLENDING SYSTEMS |
| SEMI F75 : 2017 | GUIDE FOR QUALITY MONITORING OF ULTRAPURE WATER USED IN SEMICONDUCTOR MANUFACTURING |
| SEMI F51 : 2017 | GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY |
| SEMI C93 : 2017 | GUIDE FOR DETERMINING THE QUALITY OF ION EXCHANGE RESIN USED IN POLISH APPLICATIONS OF ULTRAPURE WATER SYSTEM |
| SEMI F108 : 2010 | GUIDE FOR INTEGRATION OF LIQUID CHEMICAL PIPING COMPONENTS FOR SEMICONDUCTOR, FLAT PANEL DISPLAY, AND SOLAR CELL MANUFACTURING APPLICATIONS |
| SEMI F41 : 2016 | GUIDE FOR QUALIFICATION OF A BULK CHEMICAL DISTRIBUTION SYSTEM USED IN SEMICONDUCTOR PROCESSING |
| SEMI F104 : 2012 | PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
| SEMI C90 : 2015 | TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
| SEMI E49.7 : 2004E | PURITY GUIDE FOR THE DESIGN AND MANUFACTURE OF ULTRAPURE WATER AND LIQUID CHEMICAL SYSTEMS IN SEMICONDUCTOR PROCESS EQUIPMENT |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI F40-0699E(R2018) | PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING |
| SEMI F61 : 2017 | GUIDE TO DESIGN AND OPERATION OF A SEMICONDUCTOR ULTRAPURE WATER SYSTEM |
| SEMI F104 : 2012 | PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
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