SEMI M26 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
GUIDE FOR THE RE-USE OF 100, 125, 150, AND 200 MM WAFER SHIPPING BOXES USED TO TRANSPORT WAFERS
Published date
12-01-2013
Specifies materials relating to transport of 100, 125, 150 and 200 mm wafers using shipping boxes.
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