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SEMI M26 : 2004(R2010)

SEMI M26 : 2004(R2010)

Current

Current

The latest, up-to-date edition.

GUIDE FOR THE RE-USE OF 100, 125, 150, AND 200 MM WAFER SHIPPING BOXES USED TO TRANSPORT WAFERS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies materials relating to transport of 100, 125, 150 and 200 mm wafers using shipping boxes.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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SEMI M45 : 2010(R2017) SPECIFICATION FOR 300 MM WAFER SHIPPING SYSTEM
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