SEMI M29 : 1996(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR 300 MM SHIPPING BOX
Published date
12-01-2013
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Specifies the parts necessary for a shipping box among cassettes specified in SEMI E57 and SEMI E1.9, within the range of the specifications in SEMI E57 and SEMI E1.9. Also specifies the size of a box containing a shipping cassette containing 300 mm wafers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E57 : 2000E2(R2010) | SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS |
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