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SEMI E57 : 2000E2(R2010)

SEMI E57 : 2000E2(R2010)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines the mechanical couplings used to ergonomically align and precisely support 300 mm wafer carriers (including transport cassettes, process cassettes, quartz boats, pods, lot boxes, and shipping boxes).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E100 : 2004(R2010) SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES
SEMI G77 : 1999(R2015) SPECIFICATION FOR FRAME CASSETTE FOR 300 MM WAFERS
SEMI M29 : 1996(R2010) SPECIFICATION FOR 300 MM SHIPPING BOX
SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
SEMI E119 : JUL 2006(R2012) MECHANICAL SPECIFICATION FOR REDUCED-PITCH FRONT-OPENING BOX FOR INTERFACTORY TRANSPORT OF 300 MM WAFERS
SEMI E92 : 2002E(R2015) SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT)
SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
SEMI E85 : 2008(R2013) SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY
SEMI M31 : 2008 MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS
SEMI E131 : 2004(R2010) SPECIFICATION FOR THE PHYSICAL INTERFACE OF AN INTEGRATED MEASUREMENT MODULE (IMM) INTO 300 MM TOOLS USING BOLTS-M
SEMI E15-1 : 2005(R2010) SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E101 : 2004(R2010) GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL
SEMI E110 : 2002(R2009) GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 MM LOAD PORTS
SEMI E152 : 2014 MECHANICAL SPECIFICATION OF EUV POD FOR 150 MM EUVL RETICLES
SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS

SEMI E19.4 : 2017 SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF)
SEMI E19 : APR 2017 SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)
SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT

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