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SEMI M29 : 1996(R2010)

SEMI M29 : 1996(R2010)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR 300 MM SHIPPING BOX

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the parts necessary for a shipping box among cassettes specified in SEMI E57 and SEMI E1.9, within the range of the specifications in SEMI E57 and SEMI E1.9. Also specifies the size of a box containing a shipping cassette containing 300 mm wafers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS

SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS

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