IEC 62047-6:2009

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test piece
  4.1 Design of test piece
  4.2 Preparation of test piece
  4.3 Test piece thickness
  4.4 Storage prior to testing
5 Testing method and test apparatus
  5.1 General
  5.2 Method of gripping (mounting of test piece)
  5.3 Static loading test
  5.4 Method of loading
  5.5 Speed of testing
  5.6 Environment control
6 Endurances (test termination)
7 Test report
Annex A (informative) Technical background of this standard
Annex B (informative) Test piece
Annex C (informative) Displacement measurement
Annex D (informative) Testing environment
Annex E (informative) Number of test pieces
Bibliography

IEC 62047-6:2009 specifies the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 µm and 10 µm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, andtest piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.