IEST RP CC028.1 : 2002
Current
Current
The latest, up-to-date edition.
Available format(s)
Hardcopy
Language(s)
English
Published date
01-05-2002
Gives a framework for describing minienvironments for microelectronics and similar applications. It is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.
| DocumentType |
Standard
|
| ISBN |
9781877862830
|
| Pages |
28
|
| PublisherName |
Institute of Environmental Sciences and Technology
|
| Status |
Current
|
| ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
| 16/30295652 DC : 0 | BS EN ISO 14644-15 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL AND SURFACE CHEMICAL CONCENTRATION |
| BS EN ISO 14644-15:2017 | Cleanrooms and associated controlled environments Assessment of suitability for use of equipment and materials by airborne chemical concentration |
| UNE-EN ISO 14644-14:2017 | Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016) |
| 14/30280736 DC : 0 | BS EN ISO 14644-14 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14 ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION |
| ISO 14644-14:2016 | Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration |
| EN ISO 14644-14:2016 | Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016) |
| EN ISO 14644-15:2017 | Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017) |
| BS EN ISO 14644-14:2016 | ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration |
| ISO 14644-15:2017 | Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration |
| I.S. EN ISO 14644-14:2016 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION (ISO/DIS 14644-14) |
| I.S. EN ISO 14644-15:2017 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION (ISO 14644-15:2017) |
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