Introduction
Section 1: Specification for single crystal wafer
1 Scope
2 Reference documents
3 Terms and definitions
4 Symbols and abbreviated terms
5 Requirements
6 Sampling
7 Test methods
8 Identification, labeling, packaging, delivery condition
Section 2: Measuring method
1 Measuring method of Curie Temperature
2 Measurement of lattice constant (Bond method)
3 Measurement of face angle by X-ray
4 Appearance inspections
Annex A (Normative) Expression using Eulerian angle for
piezoelectric Single crystal
Annex B (Informative) Crystal growth method
Annex C (Informative) Manufacturing lot
Annex D (Informative) Explanation of TTV, LTV and Sori
Annex E (Informative) Standard mechanical wafer process
flow chart
Annex F (Informative) Reference