SEMI D3 : 1991(R2009)
Current
Current
The latest, up-to-date edition.
QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
Published date
12-01-2013
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Describes various areas on the pattern surface of a flat panel display substrate and describes their relationship. Also assumes the existence of terminology and a banking convention described in other SEMI flat panel display documents.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (07/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D13 : 2008(R2013) | TERMINOLOGY FOR FPD COLOR FILTERS ASSEMBLIES |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D5 : 1994(R2003) | STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D12 : 1995(R2003) | SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES |
| SEMI D11 : 1995(R2009) | SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES |
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D15 : 1996(R2003) | FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
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