SEMI D5 : 1994(R2003)
Current
The latest, up-to-date edition.
STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
12-01-2013
Describes the specification of nominal edge length and thickness and related tolerances of a flat panel display substrate which apply to substrates mainly used in fabrication AMLCD displays. May also apply to substrates for other display types. The edge lengths specified range from 300 x 300 mm to 500 x 500 mm. A single thickness, 1.1 mm, applies to all substrates.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D16 : 1998 | SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT |
| SEMI D10 : 1995(R2003) | TEST METHOD FOR CHEMICAL DURABILITY OF FLAT PANEL DISPLAY GLASS SUBSTRATES |
| SEMI D11 : 1995(R2009) | SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES |
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D4 : 1994 | METHOD FOR REFERENCING FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D3 : 1991(R2009) | QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D12 : 1995(R2003) | SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES |
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