SEMI D5 : 1994(R2003)
Current
The latest, up-to-date edition.
STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
12-01-2013
Describes the specification of nominal edge length and thickness and related tolerances of a flat panel display substrate which apply to substrates mainly used in fabrication AMLCD displays. May also apply to substrates for other display types. The edge lengths specified range from 300 x 300 mm to 500 x 500 mm. A single thickness, 1.1 mm, applies to all substrates.
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