SEMI E1 : NOV 2010(R2016)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS
Published date
12-01-2013
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Specifies the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 inch, 100 mm, 125 mm and 150 mm diameter wafers. Also includes some related information on, but not a specification for, 200 mm diameter wafer carriers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) SEMI E1-9 is no longer published within the SEMI E1 family of standards. It is published and sold separately on its own page. (09/2002)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E22 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME |
| SEMI E23 : 2004(R2010) | SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI D11 : 1995(R2009) | SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES |
| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
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