SEMI E112 : OCT 2017
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES
Published date
12-01-2013
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Defines the 150 mm Multiple Reticle SMIF Pod (MRSP150) used to transport and store six 6 inch reticles in an integrated circuit (IC) manufacturing facility.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E117 : 2017 | SPECIFICATION FOR RETICLE LOAD PORT |
| SEMI E19.3 : 2009 | STANDARD MECHANICAL INTERFACE (SMIF), SPECIFICATION FOR 150 MM (6 INCH) PORT |
| SEMI P5 : 2016 | SPECIFICATION FOR PELLICLES |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E30.1 : 2017 | SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) |
| SEMI E111 : OCT 2017 | SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE |
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