SEMI E116 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
Superseded date
05-04-2024
Superseded by
Published date
12-01-2013
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Gives specification for implementing basic equipment performance tracking (EPT) for production equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2002)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E116.1 : 2007 | SPECIFICATION FOR SECS-2 PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT) |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI E79 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY |
| SEMI E124 : 2007(R2013) | GUIDE FOR DEFINITION AND CALCULATION OF OVERALL FACTORY EFFICIENCY (OFE) AND OTHER ASSOCIATED FACTORY-LEVEL PRODUCTIVITY METRICS |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI E101 : 2004(R2010) | GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL |
| SEMI E79 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
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