SEMI E120 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
15-10-2022
12-01-2013
Specifies a generally applicable object model of semiconductor equipment structure and related elements. This object model is intended to be used in the following ways: - As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host; - As a base model to be used and extended by other SEMI equipment communication standards; - As a reference for the creation of technology-specific object model definitions, such as XML schema.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2004) Includes SEMI E120.1. (03/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E160 : 2011(R2017) | SPECIFICATION FOR COMMUNICATION OF DATA QUALITY |
| SEMI E151 : 2011(R2017) | GUIDE FOR UNDERSTANDING DATA QUALITY |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E139 : 2013 | SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E148 : 2009(R2014) | SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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