SEMI E121 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
Superseded date
17-05-2023
Superseded by
Published date
12-01-2013
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Pertains to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI (02/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E132.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA) |
| SEMI E120 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E120.1 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E132 : 2015 | SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION |
| SEMI E134.1 : 2014 | SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM) |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E139.3 : 2011 | XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E145 : 2014 | CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML |
| SEMI E133 : 2018 | SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E139.1 : 2010 | XML SCHEMA FOR THE RAP PDE |
| SEMI E142 : MAR 2006 | SPECIFICATION FOR SUBSTRATE MAPPING |
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