SEMI E132 : 2015
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION
Superseded date
18-05-2022
Superseded by
Published date
12-01-2013
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Pertains to all semiconductor manufacturing equipment that requires authentication and authorization for its services.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI (02/2004) Includes SEMI E132.1. (02/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E160 : 2011(R2017) | SPECIFICATION FOR COMMUNICATION OF DATA QUALITY |
| SEMI E151 : 2011(R2017) | GUIDE FOR UNDERSTANDING DATA QUALITY |
| SEMI E139.3 : 2011 | XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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