SEMI E134 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR DATA COLLECTION MANAGEMENT
Superseded date
06-04-2019
Superseded by
Published date
12-01-2013
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Gives a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Includes SEMI E134.1. (10/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E160 : 2011(R2017) | SPECIFICATION FOR COMMUNICATION OF DATA QUALITY |
| SEMI E151 : 2011(R2017) | GUIDE FOR UNDERSTANDING DATA QUALITY |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E139.3 : 2011 | XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E133 : 2018 | SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E148 : 2009(R2014) | SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E132.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E120.1 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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