SEMI E141 : 2005
Current
The latest, up-to-date edition.
GUIDE FOR SPECIFICATION OF ELLIPSOMETER EQUIPMENT FOR USE IN INTEGRATED METROLOGY
12-01-2013
Provides a guide for a unique specification of the most commonly applied ellipsometer equipment, the comprised modules and components, and their spatial arrangement. Also describes reflection ellipsometric measurements in integrated metrology and covers the typical applications of ellipsometry, which are the determination of layer thickness and optical properties.
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