SEMI E141 : 2005
Current
The latest, up-to-date edition.
GUIDE FOR SPECIFICATION OF ELLIPSOMETER EQUIPMENT FOR USE IN INTEGRATED METROLOGY
12-01-2013
Provides a guide for a unique specification of the most commonly applied ellipsometer equipment, the comprised modules and components, and their spatial arrangement. Also describes reflection ellipsometric measurements in integrated metrology and covers the typical applications of ellipsometry, which are the determination of layer thickness and optical properties.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
| SEMI E89 : 2007(R2013) | GUIDE FOR MEASUREMENT SYSTEM ANALYSIS (MSA) |
| SEMI MF576 -2012:(R2018) | TEST METHOD FOR MEASUREMENT OF INSULATOR THICKNESS AND REFRACTIVE INDEX ON SILICON SUBSTRATES BY ELLIPSOMETRY |
| SEMI E30.5 : 2002(R2017) | SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL (MSEM) |
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