SEMI E146 : 2006
Current
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The latest, up-to-date edition.
TEST METHOD FOR THE DETERMINATION OF PARTICULATE CONTAMINATION FROM MINIENVIRONMENTS USED FOR STORAGE AND TRANSPORT OF SILICON WAFERS
Published date
12-01-2013
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Defines a test method for the determination of particulate contamination from minienvironments used for storage and transport of silicon wafers in semiconductor manufacturing.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2006)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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