SEMI E159 : 2014
Current
Current
The latest, up-to-date edition.
MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS
Published date
12-01-2013
Sorry this product is not available in your region.
Sets up basic physical dimensions for the carriers intended to be used to transport and ship 450 mm wafers, as specified by SEMI M74.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2011)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI M49 : 2016 | GUIDE FOR SPECIFYING GEOMETRY MEASUREMENT SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 16 NM TECHNOLOGY GENERATIONS |
| SEMI E156 : 2015 | SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT |
| SEMI M52 : 2014 | GUIDE FOR SPECIFYING SCANNING SURFACE INSPECTION SYSTEMS FOR SILICON WAFERS FOR THE 130 NM TO 11 NM TECHNOLOGY GENERATIONS |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E144 : 2012 | SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT |
| SEMI E154 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT |
| SEMI M74 : 2008(R2018) | SPECIFICATION FOR 450 MM DIAMETER MECHANICAL HANDLING POLISHED WAFERS |
| SEMI E30.1 : 2017 | SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.