SEMI E30.1 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
Superseded date
23-05-2023
Superseded by
Published date
12-01-2013
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Pertains to the definition of Inspection, Review, and Inspection/Review equipment behavior as perceived by a SEMI Equipment Communications Standard II (SEMI E5/SECS-II) host that complies with SEMI E30.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2006) No longer published within the SEMI E30 family of standards. Published and sold separately on its own page. (02/2009)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E100 : 2004(R2010) | SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES |
| SEMI E107 : 2002(R2010) | SPECIFICATION OF ELECTRIC FAILURE LINK DATA FORMAT FOR YIELD MANAGEMENT SYSTEM |
| SEMI E111 : OCT 2017 | SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE |
| SEMI E159 : 2014 | MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS |
| SEMI E112 : OCT 2017 | SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES |
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
| SEMI E37.1 : 2002(R2013) | HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
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