SEMI E40 : 2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR PROCESSING MANAGEMENT
Superseded date
05-04-2024
Superseded by
Published date
12-01-2013
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Defines the application of the appropriate processing to specified material received at the processing agent.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E40.1. (08/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E94.1 : 2007 | SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM) |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E134.1 : 2014 | SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM) |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI D54 : 2009E | SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD) |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E40.1 : 2013 | SECS-2 SUPPORT FOR PROCESSING MANAGEMENT STANDARD |
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E126 : 2008(R2018) | SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP) |
| SEMI E130 : 2017 | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI E172 : 2018 | SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD) |
| SEMI E168 : 2015 | SPECIFICATION FOR PRODUCT TIME MEASUREMENT |
| SEMI E170 : DEC 2017 | SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS) |
| SEMI E53.1 : 2004 | SECS-2 SUPPORT FOR EVENT REPORTING STANDARD |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI HB4 : 2013 | SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI) |
| SEMI E139 : 2013 | SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
| SEMI E171 : FEB 2016 | SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E142 : MAR 2006 | SPECIFICATION FOR SUBSTRATE MAPPING |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI E53 : 2004 | EVENT REPORTING |
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