Name: SEMI E85 : 2008(R2013)
Brand: SEMI

SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the dimensional requirements for the interbay load ports of 300 mm automated material handling systems (AMHS) equipment.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E106 : 2004

OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS

SEMI E1-9 : NOV 2006E	MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
SEMI E15-1 : 2005(R2010)	SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E57 : 2000E2(R2010)	SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
SEMI E15 : 1998E2(R2016)	SPECIFICATION FOR TOOL LOAD PORT
SEMI E47.1 : NOV 2006	MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS

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SEMI E85 : 2008(R2013)