SEMI M76 : 2010
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DEVELOPMENTAL 450 MM DIAMETER POLISHED SINGLE CRYSTAL SILICON WAFERS
Published date
12-01-2013
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Defines dimensional and crystallographic orientation requirements for 450 mm diameter, polished single crystal silicon wafers needed in development.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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