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SEMI MF1392:2007
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR DETERMINING NET CARRIER DENSITY PROFILES IN SILICON WAFERS BY CAPACITANCE-VOLTAGE MEASUREMENTS WITH A MERCURY PROBE
Available format(s)
Hardcopy
Superseded date
17-11-2023
Language(s)
English
Published date
04-08-2018
Describes a means for determining net carrier density without formation of a special diode structure on the layer.
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