09/30207175 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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BS EN 62276 - SINGLE CRYSTAL WAFERS FOR SURFACE ACOUSTIC WAVE (SAW) DEVICE APPLICATIONS - SPECIFICATIONS AND MEASURING METHOD
Hardcopy , PDF
28-02-2013
English
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FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Requirements
4.1 Material specification
4.2 Wafer specifications
5 Sampling
5.1 Sampling
5.2 Sampling frequency
5.3 Inspection of whole population
6 Test methods
6.1 Diameter
6.2 Thickness
6.3 Dimension of OF
6.4 Orientation of OF
6.5 TV5
6.6 Warp
6.7 TTV
6.8 Front surface defects
6.9 Inclusions
6.10 Back surface roughness
6.11 Orientation
6.12 Curie temperature
6.13 Lattice constant
7 Identification, labeling, packaging, delivery condition
7.1 Packaging
7.2 Labelling and identification
7.3 Delivery condition
8 Measurement of Curie temperature
8.1 General
8.2 DTA method
8.3 Dielectric constant method
9 Measurement of lattice constant (Bond method)
10 Measurement of face angle by X-ray
10.1 Measurement principle
10.2 Measurement method
10.3 Measuring surface orientation of wafer
10.4 Measuring OF flat orientation
10.5 Typical wafer orientations and reference planes
11 Measurement of bulk resistivity
11.1 Resistance measurement of a wafer
11.2 Electrode
11.3 Bulk resistivity
12 Visual inspections
BS EN 62276
| Committee |
EPL/49
|
| DocumentType |
Draft
|
| Pages |
41
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ASTM F 154 : 2002 | Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003) |
| IEC 61019-1:2004 | Surface acoustic wave (SAW) resonators - Part 1: Generic specification |
| IEC 60410:1973 | Sampling plans and procedures for inspection by attributes |
| IEC 60862-1:2015 | Surface acoustic wave (SAW) filters of assessed quality - Part 1: Generic specification |
| IEC 60758:2016 | Synthetic quartz crystal - Specifications and guidelines for use |
| IEC 61019-2:2005 | Surface acoustic wave (SAW) resonators - Part 2: Guide to the use |
| IEC 60862-2:2012 | Surface acoustic wave (SAW) filters of assessed quality - Part 2: Guidelines for the use |
| IEC 60862-3:2003 | Surface acoustic wave (SAW) filters of assessed quality - Part 3: Standard outlines |
| ASTM F 657 : 1992 : R1999 | Standard Test Method for Measuring Warp and Total Thickness Variation on Silicon Wafers by Noncontact Scanning (Withdrawn 2003) |
| IEC 61019-3:1991 | Surface acoustic wave (SAW) resonators - Part 3: Standard outlines and lead connections |
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