ISO 14644-9:2012
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
View Superseded by
Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
Available format(s)
Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users
Withdrawn date
09-05-2022
Superseded by
Language(s)
French, English
Published date
08-08-2012
Important note : Users cannot be edited or removed once added to your Multi user PDF.
ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics are also given
ISO 14644-9:2012 applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environments, tools, equipment and products. The surface particle cleanliness (SPC) classification is limited to particles between 0,05 m and 500 m.
The following issues are not considered:
- requirements for the cleanliness and suitability of surfaces for specific processes;
- procedures for the cleaning of surfaces;
- material characteristics;
- references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;
- selection and use of statistical methods for classification and testing;
- other characteristics of particles, such as electrostatic charge, ionic charges, microbiological state, etc.
| DevelopmentNote |
Supersedes ISO/DIS 14644-9. (08/2012)
|
| DocumentType |
Standard
|
| Pages |
29
|
| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| SupersededBy |
| Standards | Relationship |
| ONORM EN ISO 14644-9 : 2012 | Identical |
| NBN EN ISO 14644-9 : 2012 | Identical |
| NF EN ISO 14644-9 : 2012 | Identical |
| NEN EN ISO 14644-9 : 2012 | Identical |
| NS EN ISO 14644-9 : 2012 | Identical |
| I.S. EN ISO 14644-9:2012 | Identical |
| PN EN ISO 14644-9 : 2012 | Identical |
| SN EN ISO 14644-9 : 2012 | Identical |
| UNI EN ISO 14644-9 : 2012 | Identical |
| SS-EN ISO 14644-9 : 2012 | Identical |
| UNE-EN ISO 14644-9:2014 | Identical |
| BS EN ISO 14644-9:2012 | Identical |
| EN ISO 14644-9:2012 | Identical |
| DIN EN ISO 14644-9:2012-12 | Identical |
| BS EN ISO 14644-10:2013 | Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration |
| BS EN ISO 14644-13:2017 | Cleanrooms and associated controlled environments Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications |
| I.S. EN ISO 14644-10:2013 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013) |
| DIN EN ISO 14644-13:2016-03 (Draft) | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS (ISO 14644-13:2017) |
| ISO 14644-13:2017 | Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications |
| I.S. EN ISO 14644-14:2016 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION (ISO/DIS 14644-14) |
| DIN EN ISO 14644-10:2013-06 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
| VDI 2083 Blatt 17:2013-06 | Cleanroom technology - Compatibility of materials with the required cleanliness |
| VDI 2083 Blatt 9.2:2017-01 | Cleanroom technology - Consumables in the cleanroom |
| VDI 2083 Blatt 8.1:2014-10 | Cleanroom technology - Air cleanliness chemical concentration (ACC) |
| VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
| UNE-EN ISO 14644-14:2017 | Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016) |
| 16/30326493 DC : 0 | BS EN ISO 14644-3 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS |
| 14/30280736 DC : 0 | BS EN ISO 14644-14 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14 ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION |
| 16/30280732 DC : 0 | BS EN ISO 14644-13 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS |
| EN ISO 14644-13:2017 | Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017) |
| UNI EN ISO 14644-10 : 2013 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION |
| I.S. EN ISO 14644-13:2017 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS (ISO 14644-13:2017) |
| ISO 14644-14:2016 | Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration |
| EN ISO 14644-10:2013 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
| EN ISO 14644-14:2016 | Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016) |
| UNE-EN ISO 14644-10:2014 | Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
| BS EN ISO 14644-14:2016 | ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration |
| 16/30341759 DC : 0 | BS EN 16602-70-54 - SPACE PRODUCT ASSURANCE - ULTRACLEANING OF FLIGHT HARDWARE |
| SEMI E78 : 2012 | GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 10015:1999 | Quality management Guidelines for training |
| ISO 16232-3:2007 | Road vehicles Cleanliness of components of fluid circuits Part 3: Method of extraction of contaminants by pressure rinsing |
| IEC 61340-5-1:2016 | Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements |
| ISO 16232-2:2007 | Road vehicles Cleanliness of components of fluid circuits Part 2: Method of extraction of contaminants by agitation |
| ISO 16232-5:2007 | Road vehicles Cleanliness of components of fluid circuits Part 5: Method of extraction of contaminants on functional test bench |
| ISO 16232-4:2007 | Road vehicles Cleanliness of components of fluid circuits Part 4: Method of extraction of contaminants by ultrasonic techniques |
| ISO 10576-1:2003 | Statistical methods — Guidelines for the evaluation of conformity with specified requirements — Part 1: General principles |
| SEMI E43 : 2013 | RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES |
| IEST RP CC022.2 : 2004(R2008) | ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS |
| ISO/TS 21748:2004 | Guidance for the use of repeatability, reproducibility and trueness estimates in measurement uncertainty estimation |
| CLC/TR 61340-5-2:2008 | Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide |
| IEST STD CC1246 : 2013 | PRODUCT CLEANLINESS LEVELS - APPLICATIONS, REQUIREMENTS, AND DETERMINATION |
| ISO 5725-2:1994 | Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.