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ISO 18115-1:2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Superseded date

19-06-2023

Superseded by

ISO 18115-1:2023

Language(s)

English

Published date

04-11-2013

€60.00
Excluding VAT

ISO 18115-1:2013 defines terms for surface chemical analysis. It covers general terms and those used in spectroscopy.

Committee
ISO/TC 201/SC 1
DevelopmentNote
Together with ISO 18115-2, supersedes ISO 18115. (07/2010) Supersedes ISO/DIS 18115-1. (11/2013)
DocumentType
Standard
Pages
104
PublisherName
International Organization for Standardization
Status
Superseded
SupersededBy
Supersedes

Standards Relationship
BS ISO 18115-1:2013 Identical
DIN ISO 18115-1:2016-09 (Draft) Identical
DIN ISO 18115-1:2017-07 Identical
JIS K 0147-1:2017 Identical
NEN ISO 18115-1 : 2010 Identical
NF ISO 18115-1 : 2010 Identical

BS ISO 22493:2014 Microbeam analysis. Scanning electron microscopy. Vocabulary
PD CEN ISO/TS 80004-6:2015 Nanotechnologies. Vocabulary Nano-object characterization
ISO 19830:2015 Surface chemical analysis Electron spectroscopies Minimum reporting requirements for peak fitting in X-ray photoelectron spectroscopy
PD ISO/TR 18196:2016 Nanotechnologies. Measurement technique matrix for the characterization of nano-objects
BS EN ISO 14644-10:2013 Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration
PD ISO/TS 80004-11:2017 Nanotechnologies. Vocabulary Nanolayer, nanocoating, nanofilm, and related terms
BS ISO 18337:2015 Surface chemical analysis. Surface characterization. Measurement of the lateral resolution of a confocal fluorescence microscope
BS ISO 16531:2013 Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
BS PD ISO/TS 80004-6 : 2013 NANOTECHNOLOGIES - VOCABULARY - PART 6: NANO-OBJECT CHARACTERIZATION
CEN ISO/TS 80004-6:2015 Nanotechnologies - Vocabulary - Part 6: Nano-object characterization (ISO/TS 80004-6:2013)
ISO 15472:2010 Surface chemical analysis X-ray photoelectron spectrometers Calibration of energy scales
14/30283682 DC : 0 BS ISO 14707 - SURFACE CHEMICAL ANALYSIS - GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY (GD-OES) - INTRODUCTION TO USE
16/30302555 DC : 0 BS ISO 16962 - SURFACE CHEMICAL ANALYSIS - ANALYSIS OF ZINC- AND/OR ALUMINIUM-BASED METALLIC COATINGS BY GLOW-DISCHARGE OPTICAL-EMISSION SPECTROMETRY
BS ISO 28600:2011 Surface chemical analysis. Data transfer format for scanning-probe microscopy
I.S. EN ISO 14644-10:2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013)
BS ISO 15471:2004 Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters
ISO 12406:2010 Surface chemical analysis Secondary-ion mass spectrometry Method for depth profiling of arsenic in silicon
ISO 20903:2011 Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Methods used to determine peak intensities and information required when reporting results
DIN ISO 15632:2015-11 Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis (ISO 15632:2012)
BS ISO 26824:2013 Particle characterization of particulate systems. Vocabulary
BS ISO 23833:2013 Microbeam analysis. Electron probe microanalysis (EPMA). Vocabulary
BS ISO 16242:2011 Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES)
BS ISO 16962:2017 Surface chemical analysis. Analysis of zinc- and/or aluminium-based metallic coatings by glow-discharge optical-emission spectrometry
ISO 13424:2013 Surface chemical analysis X-ray photoelectron spectroscopy Reporting of results of thin-film analysis
S.R. CEN ISO/TS 80004-6:2015 NANOTECHNOLOGIES - VOCABULARY - PART 6: NANO-OBJECT CHARACTERIZATION (ISO/TS 80004-6:2013)
ISO/TS 80004-13:2017 Nanotechnologies — Vocabulary — Part 13: Graphene and related two-dimensional (2D) materials
DIN EN ISO 14644-10:2013-06 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
ISO/TS 80004-11:2017 Nanotechnologies — Vocabulary — Part 11: Nanolayer, nanocoating, nanofilm, and related terms
12/30241146 DC : 0 BS ISO 16531 - SURFACE CHEMICAL ANALYSIS - DEPTH PROFILING - METHODS FOR ION BEAM ALIGNMENT AND THE ASSOCIATED MEASUREMENT OF CURRENT OR CURRENT DENSITY FOR DEPTH PROFILING IN AES AND XPS
11/30196563 DC : 0 BS EN ISO 14644-10 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION
BS ISO 13424:2013 Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis
BS ISO 16243:2011 Surface chemical analysis. Recording and reporting data in X-ray photoelectron spectroscopy (XPS)
BS ISO 19830:2015 Surface chemical analysis. Electron spectroscopies. Minimum reporting requirements for peak fitting in X-ray photoelectron spectroscopy
BS ISO 15632:2012 Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis
BS ISO 20579-4:2018 Surface chemical analysis. Guidelines to sample handling, preparation and mounting Reporting information related to the history, preparation, handling and mounting of nano-objects prior to surface analysis
ISO 16243:2011 Surface chemical analysis — Recording and reporting data in X-ray photoelectron spectroscopy (XPS)
ISO 16242:2011 Surface chemical analysis — Recording and reporting data in Auger electron spectroscopy (AES)
ISO 16962:2017 Surface chemical analysis Analysis of zinc- and/or aluminium-based metallic coatings by glow-discharge optical-emission spectrometry
ISO 11505:2012 Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
ISO 15471:2016 Surface chemical analysis Auger electron spectroscopy Description of selected instrumental performance parameters
ISO 14707:2015 Surface chemical analysis Glow discharge optical emission spectrometry (GD-OES) Introduction to use
ISO 22493:2014 Microbeam analysis — Scanning electron microscopy — Vocabulary
BS ISO 10810:2010 Surface chemical analysis. X-ray photoelectron spectroscopy. Guidelines for analysis
ISO 20579-4:2018 Surface chemical analysis — Guidelines to sample handling, preparation and mounting — Part 4: Reporting information related to the history, preparation, handling and mounting of nano-objects prior to surface analysis
ISO/TR 19693:2018 Surface chemical analysis Characterization of functional glass substrates for biosensing applications
PD ISO/TS 80004-13:2017 Nanotechnologies. Vocabulary Graphene and related two-dimensional (2D) materials
18/30368969 DC : 0 BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER
17/30356000 DC : 0 BS ISO 13084 - SURFACE CHEMICAL ANALYSIS - SECONDARY-ION MASS SPECTROMETRY - CALIBRATION OF THE MASS SCALE FOR A TIME-OF-FLIGHT SECONDARY-ION MASS SPECTROMETER
BS ISO 11505:2012 Surface chemical analysis. General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
15/30300681 DC : 0 BS ISO 19830 - SURFACE CHEMICAL ANALYSIS - ELECTRON SPECTROSCOPIES - MINIMUM REPORTING REQUIREMENTS FOR PEAK FITTING IN X-RAY PHOTOELECTRON SPECTROSCOPY
UNI EN ISO 14644-10 : 2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION
BS ISO 12406:2010 Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon
ISO 18337:2015 Surface chemical analysis — Surface characterization — Measurement of the lateral resolution of a confocal fluorescence microscope
ASTM E 995 : 2016 : REDLINE Standard Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
ASTM E 1829 : 2014 : REDLINE Standard Guide for Handling Specimens Prior to Surface Analysis
ISO/TS 80004-6:2013 Nanotechnologies Vocabulary Part 6: Nano-object characterization
EN ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
BS ISO 19668:2017 Surface chemical analysis. X-ray photoelectron spectroscopy. Estimating and reporting detection limits for elements in homogeneous materials
UNE-EN ISO 14644-10:2014 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
BS ISO 16129:2012 Surface chemical analysis. X-ray photoelectron spectroscopy. Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
ISO 19668:2017 Surface chemical analysis — X-ray photoelectron spectroscopy — Estimating and reporting detection limits for elements in homogeneous materials
12/30255191 DC : 0 BS ISO 11505 - SURFACE CHEMICAL ANALYSIS - GENERAL PROCEDURES FOR QUANTITATIVE COMPOSITIONAL DEPTH PROFILING BY GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY
ISO 28600:2011 Surface chemical analysis Data transfer format for scanning-probe microscopy
ISO 20411:2018 Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
ISO 16531:2013 Surface chemical analysis Depth profiling Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
ISO 10810:2010 Surface chemical analysis X-ray photoelectron spectroscopy Guidelines for analysis
BS ISO 20903:2011 Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Methods used to determine peak intensities and information required when reporting results
ISO 26824:2013 Particle characterization of particulate systems — Vocabulary
ISO 16129:2012 Surface chemical analysis X-ray photoelectron spectroscopy Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
NF ISO 10810 : 2011 SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS
ISO 23833:2013 Microbeam analysis — Electron probe microanalysis (EPMA) — Vocabulary
ISO/TR 18196:2016 Nanotechnologies — Measurement technique matrix for the characterization of nano-objects
ASTM E 1078 : 2014 : REDLINE Standard Guide for Specimen Preparation and Mounting in Surface Analysis
ISO 15632:2012 Microbeam analysis Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis

ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ASTM E 673 : 2003 Standard Terminology Relating to Surface Analysis (Withdrawn 2012)
ISO Guide 30:2015 Reference materials — Selected terms and definitions
IEC 60050-111:1996 International Electrotechnical Vocabulary (IEV) - Part 111: Physics and chemistry
ISO 80000-10:2009 Quantities and units Part 10: Atomic and nuclear physics

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