SEMI E101 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL
Published date
12-01-2013
Sorry this product is not available in your region.
Presents a functional structure model of an Equipment Front End Module (EFEM) that handles carriers and substrates at the interface between the factory material handling system and the process equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E116 : 2017 | SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING |
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E118 : NOV 2004E | SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE |
| SEMI E110 : 2002(R2009) | GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 MM LOAD PORTS |
| SEMI E64 : 2005(R2012) | SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT |
| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E75 : 1998 | PROVISIONAL MECHANICAL SPECIFICATION FOR BOX/POD COMPATIBLE CASSETTES USED TO TRANSPORT AND STORE 300-MM WAFERS |
| SEMI E15-1 : 2005(R2010) | SPECIFICATION FOR 300 MM TOOL LOAD PORT |
| SEMI E57 : 2000E2(R2010) | SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS |
| SEMI E23 : 2004(R2010) | SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.