SEMI E103 : 2004
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP
01-11-2010
12-01-2013
Describes the carrier side of the mechanical interface between load ports (or buffers) with FIMS interfaces on process or metrology equipment and a system that includes a box that holds only one wafer (such as a test wafer) and that fits onto an adapter mechanism called a single-wafer interface (SWIF).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
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| SEMI E146 : 2006 | TEST METHOD FOR THE DETERMINATION OF PARTICULATE CONTAMINATION FROM MINIENVIRONMENTS USED FOR STORAGE AND TRANSPORT OF SILICON WAFERS |
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E62 : NOV 2006(R2012) | SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS) |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
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