SEMI E117 : 2017
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR RETICLE LOAD PORT
Published date
12-01-2013
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Specifies dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2002)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI S28 : 2011 | SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E19.4 : 2017 | SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E19.3 : 2009 | STANDARD MECHANICAL INTERFACE (SMIF), SPECIFICATION FOR 150 MM (6 INCH) PORT |
| SEMI E72 : 2016 | SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT |
| SEMI E112 : OCT 2017 | SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES |
| SEMI E15-1 : 2005(R2010) | SPECIFICATION FOR 300 MM TOOL LOAD PORT |
| SEMI E100 : 2004(R2010) | SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E111 : OCT 2017 | SPECIFICATION FOR A 150 MM RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE |
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