SEMI E138 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS
Superseded date
06-04-2019
Published date
12-01-2013
Specifies the representation of Error, Data Types, Data Value Types, and Unit which are considered common components.
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