SEMI E145 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML
Superseded date
11-03-2024
Published date
12-01-2013
Describes the measurement units' symbol representations in XML for the semiconductor industry based on units defined in SEMI E5, SEMI E6, and the International System of Units (SI).
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