SEMI E145 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML
Superseded date
11-03-2024
Superseded by
Published date
12-01-2013
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Describes the measurement units' symbol representations in XML for the semiconductor industry based on units defined in SEMI E5, SEMI E6, and the International System of Units (SI).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2006)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E160 : 2011(R2017) | SPECIFICATION FOR COMMUNICATION OF DATA QUALITY |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E179:2023 | Specification for Protocol Buffers Common Components |
| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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