SEMI E160 : 2011(R2017)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR COMMUNICATION OF DATA QUALITY
Published date
12-01-2013
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Specifies a generally acceptable specification for communicating the quality of semiconductor equipment data.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2011)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E168 : 2015 | SPECIFICATION FOR PRODUCT TIME MEASUREMENT |
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E120 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E151 : 2011(R2017) | GUIDE FOR UNDERSTANDING DATA QUALITY |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
| SEMI E132 : 2015 | SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION |
| SEMI E145 : 2014 | CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML |
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