SEMI E23 : 2004(R2010)
Current
The latest, up-to-date edition.
SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE
12-01-2013
Covers the parallel I/O interface for the cassette transfer between two pieces of equipment, such as a piece of process equipment and a piece of transport equipment. Also describes the wire-connected parallel I/O interface between two pieces of equipment and the photo-coupled parallel I/O interface between the process equipment and the transport equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E30 : 2018 | SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) |
| SEMI E82 : 2006(R2018) | SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM) |
| SEMI D27 : 2000 | GUIDE FOR FLAT PANEL DISPLAY EQUIPMENT COMMUNICATION INTERFACES |
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E30.3 : 1998 | TESTING EQUIPMENT SPECIFIC EQUIPMENT MODEL (TESM) |
| SEMI E88 : 2007(R2018) | SPECIFICATION FOR AMHS STORAGE SEM (STOCKER SEM) |
| SEMI E84 : 2009(R2017) | SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE |
| SEMI S17 : 2013 | SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEMS |
| SEMI E101 : 2004(R2010) | GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL |
| SEMI E1 : NOV 2010(R2016) | SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS |
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
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