SEMI E90 : 2012(R2018)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SUBSTRATE TRACKING
Published date
12-01-2013
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Specifies the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. Also defines the concepts and behaviors for the information management of substrates, as well as the messages/services.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Revision
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E54.24 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSEN) |
| SEMI E116 : 2017 | SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI D54 : 2009E | SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD) |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E130 : 2017 | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI E172 : 2018 | SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD) |
| SEMI E118 : NOV 2004E | SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE |
| SEMI E168 : 2015 | SPECIFICATION FOR PRODUCT TIME MEASUREMENT |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E142 : MAR 2006 | SPECIFICATION FOR SUBSTRATE MAPPING |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI E53 : 2004 | EVENT REPORTING |
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