SEMI F47 : 2006(R2012)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT VOLTAGE SAG IMMUNITY
Superseded date
05-10-2020
Superseded by
Published date
12-01-2013
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Describes the voltage sag immunity required for semiconductor processing, metrology, and automated test equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI F42. (07/2006)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
| 07/30166308 DC : 0 | BS EN 60255-11 - MEASURING RELAYS AND PROTECTION EQUIPMENT - PART 11: INTERRUPTIONS TO AND ALTERNATING COMPONENT (RIPPLE) IN A.C. AND AUXILIARY ENERGIZING INPUT OF MEASURING RELAYS AND PROTECTION EQUIPMENT D.C |
| IEEE 1668-2014 | IEEE Trial-Use Recommended Practice for Voltage Sag and Short Interruption Ride-Through Testing for End-Use Electrical Equipment Rated Less than 1000 V |
| UNE-EN 60255-11:2010 | Measuring relays and protection equipment - Part 11: Voltage dips, short interruptions, variations and ripple on auxiliary power supply port |
| 08/30185866 DC : DRAFT JULY 2008 | BS EN 61000-3-15 - ELECTROMAGNETIC COMPATIBILITY (EMC) - PART 3-15: LIMITS - ASSESSMENT OF LOW FREQUENCY ELECTROMAGNETIC IMMUNITY AND EMISSION REQUIREMENTS FOR DISPERSED GENERATION SYSTEMS IN LV NETWORK |
| SEMI E51 : 2000 | GUIDE FOR TYPICAL FACILITIES SERVICES AND TERMINATION MATRIX |
| IEEE 1159-2009 | IEEE Recommended Practice for Monitoring Electric Power Quality |
| IEEE 1100 : 2005 | POWERING AND GROUNDING ELECTRONIC EQUIPMENT |
| SEMI E33 : 2017 | GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT ELECTROMAGNETIC COMPATIBILITY (EMC) |
| PD IEC/TR 61000-3-15:2011 | Electromagnetic compatibility (EMC) Limits. Assessment of low frequency electromagnetic immunity and emission requirements for dispersed generation systems in LV network |
| IEEE 1250-2011 REDLINE | IEEE Guide for Identifying and Improving Voltage Quality in Power Systems |
| IEC TR 61000-3-15:2011 | Electromagnetic compatibility (EMC) - Part 3-15: Limits - Assessment of low frequency electromagnetic immunity and emission requirements for dispersed generation systems in LV network |
| IEC 60255-11:2008 | Measuring relays and protection equipment - Part 11: Voltage dips, short interruptions, variations and ripple on auxiliary power supply port |
| BS EN 60255-11:2010 | Measuring relays and protection equipment Voltage dips, short interruptions, variations and ripple on auxiliary power supply port |
| I.S. EN 60255-11:2010 | MEASURING RELAYS AND PROTECTION EQUIPMENT - PART 11: VOLTAGE DIPS, SHORT INTERRUPTIONS, VARIATIONS AND RIPPLE ON AUXILIARY POWER SUPPLY PORT |
| IEEE 1585 : 2002 | FUNCTIONAL SPECIFICATION OF MEDIUM VOLTAGE (1-35 KV) ELECTRONIC SERIES DEVICES FOR COMPENSATION OF VOLTAGE FLUCTUATIONS |
| IEEE 1623-2004 | IEEE Guide for the Functional Specification of Medium Voltage (1 kV - 35 kV) Electronic Shunt Devices for Dynamic Voltage Compensation |
| EN 60255-11:2010 | Measuring relays and protection equipment - Part 11: Voltage dips, short interruptions, variations and ripple on auxiliary power supply port |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E51 : 2000 | GUIDE FOR TYPICAL FACILITIES SERVICES AND TERMINATION MATRIX |
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