SEMI M24 : 2007
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON PREMIUM WAFERS
Published date
12-01-2013
Specifies requirements for virgin silicon premium wafers with nominal diameter from 150-300 mm used for particle counting, metal contamination monitoring, and measuring pattern resolution in the photolithography process in semiconductor manufacturing.
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