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SEMI M24 : 2007

SEMI M24 : 2007

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON PREMIUM WAFERS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies requirements for virgin silicon premium wafers with nominal diameter from 150-300 mm used for particle counting, metal contamination monitoring, and measuring pattern resolution in the photolithography process in semiconductor manufacturing.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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