SEMI MF1451:2007(R2019)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR MEASURING SORI ON SILICON WAFERS BY AUTOMATED NON-CONTACT SCANNING
Available format(s)
Hardcopy
Superseded date
07-06-2021
Language(s)
English
Published date
12-01-2013
Describes a non-contacting, nondestructive procedure to determine the sori of clean, dry semiconductor wafers.
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