SEMI T13 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES
Published date
12-01-2013
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Specifies device tracking data transfer between entities in a fab. Some entities may be physical or logical depending on configuration of the fab. Sometimes the transfer is carried out between entities in different companies over such communication media as internet or VPN (Virtual Private Network).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004) Includes SEMI T13.1 & SEMI T13.2. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI T13.2 : 2004(R2010) | SPECIFICATION FOR XML PROTOCOL FOR DEVICE TRACKING |
| SEMI T17 :2006(R2018) | SPECIFICATION OF SUBSTRATE TRACEABILITY |
| SEMI T19 : 2011(R2017) | SPECIFICATION FOR DEVICE MARKING |
| SEMI T13.1 : 2004(R2010) | SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING |
| SEMI G84 : 2003 | SPECIFICATION FOR STRIP MAP PROTOCOL |
| SEMI M17 : 2010(R2015) | GUIDE FOR A UNIVERSAL WAFER GRID |
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
| SEMI G81 : 2007(R2015) | SPECIFICATION FOR MAP DATA ITEMS |
| SEMI E130 : 2017 | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI G85 : JUL 2003 | SPECIFICATION FOR MAP DATA FORMAT |
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