SEMI E125 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)
Superseded date
11-05-2022
Superseded by
Published date
12-01-2013
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Describes the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Includes SEMI E125.1. (06/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E134.1 : 2014 | SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM) |
| SEMI E160 : 2011(R2017) | SPECIFICATION FOR COMMUNICATION OF DATA QUALITY |
| SEMI E151 : 2011(R2017) | GUIDE FOR UNDERSTANDING DATA QUALITY |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E172 : 2018 | SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD) |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E133 : 2018 | SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E120 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E132.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA) |
| SEMI E120.1 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI E145 : 2014 | CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML |
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