SEMI E58 : JUL 2003
Current
The latest, up-to-date edition.
AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES
12-01-2013
Specifies various terms and equipment states but was not written specifically for application by automated equipment, consistent interpretation of these equipment states through formal state model methodology. ARAMS defines concepts, behavior, and message services to support the integration of automated systems within a semiconductor factory.
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