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SEMI G77 : 1999(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR FRAME CASSETTE FOR 300 MM WAFERS
Superseded date
08-02-2021
Published date
12-01-2013
Describes the mechanical features for a 300 mm wafer frame cassette used between the wafer mounting process and the die-bonding process.
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