SEMI MF671:2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR MEASURING FLAT LENGTH ON WAFERS OF SILICON AND OTHER ELECTRONIC MATERIALS
17-11-2023
12-01-2013
Covers measuring flat length on wafers of silicon and other electronic materials. Also it's suitable for use in research, development, process control, quality assurance, and materials acceptance applications.
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