VDI 2083 Blatt 17:2013-06
Current
Current
The latest, up-to-date edition.
Cleanroom technology - Compatibility of materials with the required cleanliness
Available format(s)
Hardcopy , PDF
Language(s)
German - English
Published date
01-06-2013
Publisher
Important note : Users cannot be edited or removed once added to your Multi user PDF.
Preliminary note
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Requirements
6 Procedure for testing and acceptance, metrology
7 Documentation
Annex A - Application examples and typical fields
of application for this guideline
Annex B - Example of determining the particle
emission class
Annex C - Example of determining the outgassing class
Bibliography
Term index
In essence, the present guideline deals with particulate, chemical (molecular) emissions and electrostatic characteristics of materials and the cleanability of material surfaces.
| DocumentType |
Standard
|
| Pages |
71
|
| PublisherName |
Verlag des Vereins Deutscher Ingenieure
|
| Status |
Current
|
| Supersedes |
| EN 16516:2017 | Construction products: Assessment of release of dangerous substances - Determination of emissions into indoor air |
| VDI 2083 Blatt 3.1:2012-06 | Cleanroom technology - Metrology in cleanroom air - Monitoring |
| VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
| VDI 2083 Blatt 9.2:2017-01 | Cleanroom technology - Consumables in the cleanroom |
| VDI 2083 Blatt 18:2012-01 | Cleanroom technology - Biocontamination control |
| BS EN 16516:2017 | Construction products: Assessment of release of dangerous substances. Determination of emissions into indoor air |
| I.S. EN 16516:2017 | CONSTRUCTION PRODUCTS: ASSESSMENT OF RELEASE OF DANGEROUS SUBSTANCES - DETERMINATION OF EMISSIONS INTO INDOOR AIR |
| SEMI E78 : 2012 | GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT |
| VDE 0300-5-1 SUPP 1 : 2009 COR 1 2012 | ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE |
| EN ISO 14644-4:2001 | Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001) |
| DIN EN ISO 4628-1:2016-07 | PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 1: GENERAL INTRODUCTION AND DESIGNATION SYSTEM (ISO 4628-1:2016) |
| EN ISO 4628-2:2016 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 2: Assessment of degree of blistering (ISO 4628-2:2016) |
| VDA PART 19 : DRAFT 2004 | INSPECTION OF TECHNICAL CLEANLINESS - PARTICULATE CONTAMINATION OF FUNCTIONALLY - RELEVANT AUTOMOTIVE COMPONENTS |
| SEMI E45 : NOV 2001(R2007) | TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS) |
| SEMI E46 : 2007 | TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) |
| ISO 9241-5:1998 | Ergonomic requirements for office work with visual display terminals (VDTs) — Part 5: Workstation layout and postural requirements |
| DIN EN ISO 14644-1:2016-06 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015) |
| DIN EN ISO 4628-7:2016-07 | PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 7: ASSESSMENT OF DEGREE OF CHALKING BY VELVET METHOD (ISO 4628-7:2016) |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
| VDE 0300-5-2 : 2002 | ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA; USER GUIDE |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| EN 1815:1997 | Resilient and textile floor coverings - Assessment of static electrical propensity |
| DIN EN ISO 4628-6:2011-12 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 6: Assessment of degree of chalking by tape method (ISO 4628-6:2011) |
| DIN EN ISO 26987:2012-04 | Resilient floor coverings - Determination of staining and resistance to chemicals (ISO 26987:2008) |
| EN 61340-5-1:2016/AC:2017-05 | ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016/COR1:2017) |
| EN ISO 4628-1:2016 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 1: General introduction and designation system (ISO 4628-1:2016) |
| IEC 60364-4-41:2005+AMD1:2017 CSV | Low voltage electrical installations - Part 4-41: Protection for safety - Protection against electric shock |
| VDI 2083 Blatt 3:2005-07 | Cleanroom technology - Metrology and test methods |
| VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
| DIN EN 1335-2:2016-09 (Draft) | OFFICE FURNITURE - OFFICE WORK CHAIR - PART 2: SAFETY REQUIREMENTS |
| IEC 61340-5-1:2016 | Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements |
| VDI 2083 Blatt 10:1998-02 | Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems |
| VDE 0100-600 : 2017-06 | LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 6: VERIFICATION (IEC 60364-6:2016) |
| HD 60364-4-41:2017/A11:2017 | LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-41: PROTECTION FOR SAFETY - PROTECTION AGAINST ELECTRIC SHOCK |
| DIN ISO 16000-6:2012-11 | Indoor air - Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA? sorbent, thermal desorption and gas chromatography using MS or MS-FID (ISO 16000-6:2011) |
| EN ISO 26987:2012 | Resilient floor coverings - Determination of staining and resistance to chemicals (ISO 26987:2008) |
| VDI 2083 Blatt 13.2:2009-01 | Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications |
| DIN EN ISO 4628-2:2016-07 | PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 2: ASSESSMENT OF DEGREE OF BLISTERING (ISO 4628-2:2016) |
| DIN EN 61340-5-2 : 2002 | ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA; USER GUIDE |
| ISO 26987:2008 | Resilient floor coverings — Determination of staining and resistance to chemicals |
| IEC TR 61340-5-2:2007 | Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide |
| EN ISO 16017-1:2000 | Indoor, ambient and workplace air - Sampling and analysis of volatile organic compounds by sorbent tube/thermal desorption/capillary gas chromatography - Part 1: Pumped sampling (ISO 16017-1:2000) |
| DIN EN 1335-1:2002-08 | OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS |
| DIN EN ISO 2812-1:2007-05 | PAINTS AND VARNISHES - DETERMINATION OF RESISTANCE TO LIQUIDS - PART 1: IMMERSION IN LIQUIDS OTHER THAN WATER (ISO 2812-1:2017) |
| DIN EN 14041:2016-07 (Draft) | RESILIENT, TEXTILE AND LAMINATE FLOOR COVERINGS - ESSENTIAL CHARACTERISTICS |
| VDI 2083 Blatt 13.1:2009-01 | Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals |
| EN ISO 8785:1999 | Geometrical product specification (GPS) - Surface imperfections - Terms, definitions and parameters (ISO 8785:1998) |
| VDI 2083 Blatt 13.3:2010-10 | Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications |
| ISO 16017-1:2000 | Indoor, ambient and workplace air — Sampling and analysis of volatile organic compounds by sorbent tube/thermal desorption/capillary gas chromatography — Part 1: Pumped sampling |
| VDE 0300-5-1 : 2017 | ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016) |
| DIN EN ISO 9241-5:1999-08 | ERGONOMIC REQUIREMENTS FOR OFFICE WORK WITH VISUAL DISPLAY TERMINALS (VDTS) - PART 5: WORKSTATION LAYOUT AND POSTURAL REQUIREMENTS |
| DIN EN ISO 14644-4:2003-06 | Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001) |
| EN ISO 9241-5:1999 | Ergonomic requirements for office work with visual display terminals (VDTs) - Part 5: Workstation layout and postural requirements (ISO 9241-5:1998) |
| DIN EN ISO 4628-4:2016-07 | PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 4: ASSESSMENT OF DEGREE OF CRACKING (ISO 4628-4:2016) |
| DIN EN 61340-5-1 SUPP 1 : 2009 COR 1 2012 | Electrostatics- Part5-2: Protection of electronic devices from electrostatic phenomena- User guide (IEC/TR 61340-5-2:2007); German version CLC/TR 61340-5-2:2008, Corrigendumto DINEN61340-5-1 Beiblatt1 (VDE0300-5-1 Beiblatt 1):2009-09; (IEC-Cor.: 2009 to IEC61340-5-2:2007) |
| EN ISO 4628-4:2016 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 4: Assessment of degree of cracking (ISO 4628-4:2016) |
| VDI 2083 Blatt 8.1:2014-10 | Cleanroom technology - Air cleanliness chemical concentration (ACC) |
| SEMI E14 : 1993 | MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL |
| DIN EN ISO 14644-6:2007-10 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 6: VOCABULARY |
| ISO 4628-4:2016 | Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 4: Assessment of degree of cracking |
| ISO 4628-3:2016 | Paints and varnishes — Evaluation of degradation of coatings — Designation of quantity and size of defects, and of intensity of uniform changes in appearance — Part 3: Assessment of degree of rusting |
| DIN 55301:1978-09 | PRESENTATION OF STATISTICAL TABLES |
| IEC 60364-6:2016 | Low voltage electrical installations - Part 6: Verification |
| DIN EN ISO 8044:2015-12 | CORROSION OF METALS AND ALLOYS - BASIC TERMS AND DEFINITIONS (ISO 8044:2015) |
| EN ISO 16000-11:2006 | Indoor air - Part 11: Determination of the emission of volatile organic compounds from building products and furnishing - Sampling, storage of samples and preparation of test specimens (ISO 16000-11:2006) |
| VDE 0100-410 : 2007 | LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-41: PROTECTION FOR SAFETY - PROTECTION AGAINST ELECTRIC SHOCK |
| EN ISO 4628-3:2016 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 3: Assessment of degree of rusting (ISO 4628-3:2016) |
| VDI 1000:2017-02 | VDI Standardisation Work - Principles and procedures |
| EN ISO 8044:2015 | Corrosion of metals and alloys - Basic terms and definitions (ISO 8044:2015) |
| ISO 4628-5:2016 | Paints and varnishes — Evaluation of degradation of coatings — Designation of quantity and size of defects, and of intensity of uniform changes in appearance — Part 5: Assessment of degree of flaking |
| DIN EN 61340-5-1 : 2017 | ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016) |
| ISO 4628-1:2016 | Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 1: General introduction and designation system |
| EN ISO 4628-6:2011 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 6: Assessment of degree of chalking by tape method (ISO 4628-6:2011) |
| DIN EN 1081:1998-04 | RESILIENT FLOOR COVERINGS - DETERMINATION OF THE ELECTRICAL RESISTANCE |
| ASTM G 99 : 2017 : REDLINE | Standard Test Method for Wear Testing with a Pin-on-Disk Apparatus |
| ISO 8044:2015 | Corrosion of metals and alloys Basic terms and definitions |
| ISO 16000-9:2006 | Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method |
| EN ISO 14644-8:2013 | Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013) |
| CLC/TR 61340-5-2:2008 | Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide |
| DIN EN ISO 16000-11:2006-06 | Indoor air - Part 11: Determination of the emission of volatile organic compounds from building products and furnishing - Sampling, storage of samples and preparation of test specimens (ISO 16000-11:2006) |
| DIN EN ISO 14644-9:2012-12 | Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012) |
| ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
| EN 1335-1 : 2000 COR 2002 | OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| VDI 2083 Blatt 7:2015-10 | Cleanroom technology - Ultrapure media - Quality, supply, distribution |
| ISO 8785:1998 | Geometrical Product Specification (GPS) — Surface imperfections — Terms, definitions and parameters |
| ISO 2812-1:2017 | Paints and varnishes — Determination of resistance to liquids — Part 1: Immersion in liquids other than water |
| EN 1335-2:2009 | Office furniture - Office work chair - Part 2: Safety requirements |
| SEMI S12 : 2011 | ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION |
| ISO 4628-6:2011 | Paints and varnishes — Evaluation of degradation of coatings — Designation of quantity and size of defects, and of intensity of uniform changes in appearance — Part 6: Assessment of degree of chalking by tape method |
| DIN VDE 0100-600 : 2017-06 | LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 6: VERIFICATION (IEC 60364-6:2016) |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
| EN ISO 4628-7:2016 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 7: Assessment of degree of chalking by velvet method (ISO 4628-7:2016) |
| EN 61340-5-2:2001/corrigendum:2001 | ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE |
| DIN EN ISO 4628-3:2016-07 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 3: Assessment of degree of rusting (ISO 4628-3:2016); German version EN ISO 4628-3:2016 |
| EN ISO 4628-5:2016 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 5: Assessment of degree of flaking (ISO 4628-5:2016) |
| DIN EN ISO 16017-1:2001-10 | INDOOR, AMBIENT AND WORKPLACE AIR - SAMPLING AND ANALYSIS OF VOLATILE ORGANIC COMPOUNDS BY SORBENT TUBE/THERMAL DESORPTION/CAPILLARY GAS CHROMATOGRAPHY - PART 1: PUMPED SAMPLING |
| EN 13779:2007 | Ventilation for non-residential buildings - Performance requirements for ventilation and room-conditioning systems |
| VDI 2083 Blatt 9.1:2006-12 | Clean room technology - Compatibility with required cleanliness and surface cleanliness |
| VDI 2083 Blatt 9:1991-09 (Draft) | Clean room engineering; quality, production and distribution of superpurity water |
| VDE 0300-1 : 2014 | ELECTROSTATICS - PART 1: ELECTROSTATIC PHENOMENA - PRINCIPLES AND MEASUREMENTS (IEC/TR 61340-1:2012 + COR.:2013) |
| EN 1081:1998 | Resilient floor coverings - Determination of the electrical resistance |
| DIN 50452-1:1995-11 | TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - TEST METHOD FOR PARTICLE ANALYSIS IN LIQUIDS - PART 1: MICROSCOPIC DETERMINATION OF PARTICLES |
| EN ISO 14644-7:2004 | Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004) |
| EN ISO 14644-6:2007 | Cleanrooms and associated controlled environments - Part 6: Vocabulary (ISO 14644-6:2007) |
| ISO 16000-11:2006 | Indoor air — Part 11: Determination of the emission of volatile organic compounds from building products and furnishing — Sampling, storage of samples and preparation of test specimens |
| DIN IEC 61340-1 : DRAFT 2007 | GUIDE TO THE PRINCIPLES OF ELECTROSTATIC PHENOMENA AND THEIR MEASUREMENT |
| DIN EN ISO 4628-5:2016-07 | Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 5: Assessment of degree of flaking (ISO 4628-5:2016) |
| IEC TR 61340-1:2012 | Electrostatics - Part 1: Electrostatic phenomena - Principles and measurements |
| EN ISO 14644-1:2015 | Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015) |
| EN ISO 14644-9:2012 | Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012) |
| VDI 2083 Blatt 18:2012-01 | Cleanroom technology - Biocontamination control |
| ISO 16000-6:2011 | Indoor air Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID |
| ISO 4628-2:2016 | Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 2: Assessment of degree of blistering |
| ISO 4628-7:2016 | Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 7: Assessment of degree of chalking by velvet method |
| ISO 14644-9:2012 | Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration |
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