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  • VDI 2083 Blatt 17:2013-06

    Current The latest, up-to-date edition.

    Cleanroom technology - Compatibility of materials with the required cleanliness

    Available format(s):  Hardcopy, PDF

    Language(s):  German - English

    Published date:  01-06-2013

    Publisher:  Verlag des Vereins Deutscher Ingenieure

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    Table of Contents - (Show below) - (Hide below)

    Preliminary note
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Classification
    5 Requirements
    6 Procedure for testing and acceptance, metrology
    7 Documentation
    Annex A - Application examples and typical fields
              of application for this guideline
    Annex B - Example of determining the particle
              emission class
    Annex C - Example of determining the outgassing class
    Bibliography
    Term index

    Abstract - (Show below) - (Hide below)

    In essence, the present guideline deals with particulate, chemical (molecular) emissions and electrostatic characteristics of materials and the cleanability of material surfaces.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher Verlag des Vereins Deutscher Ingenieure
    Status Current
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    EN 16516:2017 Construction products: Assessment of release of dangerous substances - Determination of emissions into indoor air
    VDI 2083 Blatt 3.1:2012-06 Cleanroom technology - Metrology in cleanroom air - Monitoring
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
    VDI 2083 Blatt 9.2:2017-01 Cleanroom technology - Consumables in the cleanroom
    VDI 2083 Blatt 18:2012-01 Cleanroom technology - Biocontamination control
    BS EN 16516:2017 Construction products: Assessment of release of dangerous substances. Determination of emissions into indoor air
    I.S. EN 16516:2017 CONSTRUCTION PRODUCTS: ASSESSMENT OF RELEASE OF DANGEROUS SUBSTANCES - DETERMINATION OF EMISSIONS INTO INDOOR AIR

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E78 : 2012 GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT
    VDE 0300-5-1 SUPP 1 : 2009 COR 1 2012 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE
    EN ISO 14644-4:2001 Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001)
    DIN EN ISO 4628-1:2016-07 PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 1: GENERAL INTRODUCTION AND DESIGNATION SYSTEM (ISO 4628-1:2016)
    EN ISO 4628-2:2016 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 2: Assessment of degree of blistering (ISO 4628-2:2016)
    EN ISO 4287:1998/A1:2009 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
    VDA PART 19 : DRAFT 2004 INSPECTION OF TECHNICAL CLEANLINESS - PARTICULATE CONTAMINATION OF FUNCTIONALLY - RELEVANT AUTOMOTIVE COMPONENTS
    SEMI E45 : NOV 2001(R2007) TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS)
    SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
    ISO 9241-5:1998 Ergonomic requirements for office work with visual display terminals (VDTs) — Part 5: Workstation layout and postural requirements
    DIN EN ISO 14644-1:2016-06 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015)
    DIN EN ISO 4628-7:2016-07 PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 7: ASSESSMENT OF DEGREE OF CHALKING BY VELVET METHOD (ISO 4628-7:2016)
    ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
    VDE 0300-5-2 : 2002 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA; USER GUIDE
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
    EN 1815:1997 Resilient and textile floor coverings - Assessment of static electrical propensity
    DIN EN ISO 4628-6:2011-12 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 6: Assessment of degree of chalking by tape method (ISO 4628-6:2011)
    DIN EN ISO 26987:2012-04 Resilient floor coverings - Determination of staining and resistance to chemicals (ISO 26987:2008)
    EN 61340-5-1:2016/AC:2017-05 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016/COR1:2017)
    EN ISO 4628-1:2016 PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 1: GENERAL INTRODUCTION AND DESIGNATION SYSTEM (ISO 4628-1:2016)
    IEC 60364-4-41:2005+AMD1:2017 CSV Low voltage electrical installations - Part 4-41: Protection for safety - Protection against electric shock
    VDI 2083 Blatt 3:2005-07 Cleanroom technology - Metrology and test methods
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
    DIN EN 1335-2:2016-09 (Draft) OFFICE FURNITURE - OFFICE WORK CHAIR - PART 2: SAFETY REQUIREMENTS
    IEC 61340-5-1:2016 Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements
    VDI 2083 Blatt 10:1998-02 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
    VDE 0100-600 : 2017-06 LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 6: VERIFICATION (IEC 60364-6:2016)
    HD 60364-4-41:2017/A11:2017 LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-41: PROTECTION FOR SAFETY - PROTECTION AGAINST ELECTRIC SHOCK
    EN 1335-3:2009/AC:2009 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 3: TEST METHODS
    DIN ISO 16000-6:2012-11 Indoor air - Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA? sorbent, thermal desorption and gas chromatography using MS or MS-FID (ISO 16000-6:2011)
    EN ISO 26987 : 2012 RESILIENT FLOOR COVERINGS - DETERMINATION OF STAINING AND RESISTANCE TO CHEMICALS (ISO 26987:2008)
    VDI 2083 Blatt 13.2:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications
    DIN EN ISO 4628-2:2016-07 PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 2: ASSESSMENT OF DEGREE OF BLISTERING (ISO 4628-2:2016)
    DIN EN 61340-5-2 : 2002 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA; USER GUIDE
    ISO 26987:2008 Resilient floor coverings — Determination of staining and resistance to chemicals
    IEC TR 61340-5-2:2007 Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide
    EN ISO 16017-1:2000 Indoor, ambient and workplace air - Sampling and analysis of volatile organic compounds by sorbent tube/thermal desorption/capillary gas chromatography - Part 1: Pumped sampling (ISO 16017-1:2000)
    DIN EN 1335-1:2002-08 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS
    DIN EN ISO 2812-1:2007-05 PAINTS AND VARNISHES - DETERMINATION OF RESISTANCE TO LIQUIDS - PART 1: IMMERSION IN LIQUIDS OTHER THAN WATER (ISO 2812-1:2017)
    DIN EN 14041:2016-07 (Draft) RESILIENT, TEXTILE AND LAMINATE FLOOR COVERINGS - ESSENTIAL CHARACTERISTICS
    VDI 2083 Blatt 13.1:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals
    EN ISO 8785 : 1999 GEOMETRICAL PRODUCT SPECIFICATION (GPS) - SURFACE IMPERFECTIONS - TERMS, DEFINITIONS AND PARAMETERS
    VDI 2083 Blatt 13.3:2010-10 Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications
    ISO 16017-1:2000 Indoor, ambient and workplace air — Sampling and analysis of volatile organic compounds by sorbent tube/thermal desorption/capillary gas chromatography — Part 1: Pumped sampling
    VDE 0300-5-1 : 2017 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016)
    DIN EN ISO 9241-5:1999-08 ERGONOMIC REQUIREMENTS FOR OFFICE WORK WITH VISUAL DISPLAY TERMINALS (VDTS) - PART 5: WORKSTATION LAYOUT AND POSTURAL REQUIREMENTS
    DIN EN ISO 14644-4:2003-06 Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001)
    EN ISO 9241-5:1999 Ergonomic requirements for office work with visual display terminals (VDTs) - Part 5: Workstation layout and postural requirements (ISO 9241-5:1998)
    DIN EN ISO 4628-4:2016-07 PAINTS AND VARNISHES - EVALUATION OF DEGRADATION OF COATINGS - DESIGNATION OF QUANTITY AND SIZE OF DEFECTS, AND OF INTENSITY OF UNIFORM CHANGES IN APPEARANCE - PART 4: ASSESSMENT OF DEGREE OF CRACKING (ISO 4628-4:2016)
    DIN EN 61340-5-1 SUPP 1 : 2009 COR 1 2012 Electrostatics- Part5-2: Protection of electronic devices from electrostatic phenomena- User guide (IEC/TR 61340-5-2:2007); German version CLC/TR 61340-5-2:2008, Corrigendumto DINEN61340-5-1 Beiblatt1 (VDE0300-5-1 Beiblatt 1):2009-09; (IEC-Cor.: 2009 to IEC61340-5-2:2007)
    EN ISO 4628-4:2016 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 4: Assessment of degree of cracking (ISO 4628-4:2016)
    VDI 2083 Blatt 8.1:2014-10 Cleanroom technology - Air cleanliness chemical concentration (ACC)
    SEMI E14 : 1993 MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
    DIN EN ISO 14644-6:2007-10 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 6: VOCABULARY
    ISO 4628-4:2016 Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 4: Assessment of degree of cracking
    ISO 4628-3:2016 Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 3: Assessment of degree of rusting
    DIN 55301:1978-09 PRESENTATION OF STATISTICAL TABLES
    IEC 60364-6:2016 Low voltage electrical installations - Part 6: Verification
    DIN EN ISO 8044:2015-12 CORROSION OF METALS AND ALLOYS - BASIC TERMS AND DEFINITIONS (ISO 8044:2015)
    EN ISO 16000-11:2006 Indoor air - Part 11: Determination of the emission of volatile organic compounds from building products and furnishing - Sampling, storage of samples and preparation of test specimens (ISO 16000-11:2006)
    VDE 0100-410 : 2007 LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-41: PROTECTION FOR SAFETY - PROTECTION AGAINST ELECTRIC SHOCK
    EN ISO 4628-3:2016 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 3: Assessment of degree of rusting (ISO 4628-3:2016)
    VDI 1000:2017-02 VDI Standardisation Work - Principles and procedures
    EN ISO 8044:2015 Corrosion of metals and alloys - Basic terms and definitions (ISO 8044:2015)
    ISO 4628-5:2016 Paints and varnishes — Evaluation of degradation of coatings — Designation of quantity and size of defects, and of intensity of uniform changes in appearance — Part 5: Assessment of degree of flaking
    DIN EN 61340-5-1 : 2017 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016)
    ISO 4628-1:2016 Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 1: General introduction and designation system
    EN ISO 4628-6:2011 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 6: Assessment of degree of chalking by tape method (ISO 4628-6:2011)
    DIN EN 1081:1998-04 RESILIENT FLOOR COVERINGS - DETERMINATION OF THE ELECTRICAL RESISTANCE
    EN ISO 16000-9:2006/AC:2007 INDOOR AIR - PART 9: DETERMINATION OF THE EMISSION OF VOLATILE ORGANIC COMPOUNDS FROM BUILDING PRODUCTS AND FURNISHING - EMISSION TEST CHAMBER METHOD
    ASTM G 99 : 2017 : REDLINE Standard Test Method for Wear Testing with a Pin-on-Disk Apparatus
    ISO 8044:2015 Corrosion of metals and alloys Basic terms and definitions
    ISO 16000-9:2006 Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method
    EN ISO 14644-8:2013 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
    CLC/TR 61340-5-2:2008 Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide
    DIN EN ISO 16000-11:2006-06 Indoor air - Part 11: Determination of the emission of volatile organic compounds from building products and furnishing - Sampling, storage of samples and preparation of test specimens (ISO 16000-11:2006)
    DIN EN ISO 14644-9:2012-12 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012)
    ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
    EN 1335-1 : 2000 COR 2002 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution
    ISO 8785:1998 Geometrical Product Specification (GPS) — Surface imperfections — Terms, definitions and parameters
    ISO 2812-1:2017 Paints and varnishes — Determination of resistance to liquids — Part 1: Immersion in liquids other than water
    EN 1335-2:2009 Office furniture - Office work chair - Part 2: Safety requirements
    SEMI S12 : 2011 ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION
    ISO 4628-6:2011 Paints and varnishes — Evaluation of degradation of coatings — Designation of quantity and size of defects, and of intensity of uniform changes in appearance — Part 6: Assessment of degree of chalking by tape method
    DIN VDE 0100-600 : 2017-06 LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 6: VERIFICATION (IEC 60364-6:2016)
    ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
    EN ISO 4628-7:2016 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 7: Assessment of degree of chalking by velvet method (ISO 4628-7:2016)
    EN 61340-5-2:2001/corrigendum:2001 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE
    DIN EN ISO 4628-3:2016-07 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 3: Assessment of degree of rusting (ISO 4628-3:2016); German version EN ISO 4628-3:2016
    EN ISO 4628-5:2016 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 5: Assessment of degree of flaking (ISO 4628-5:2016)
    DIN EN ISO 16017-1:2001-10 INDOOR, AMBIENT AND WORKPLACE AIR - SAMPLING AND ANALYSIS OF VOLATILE ORGANIC COMPOUNDS BY SORBENT TUBE/THERMAL DESORPTION/CAPILLARY GAS CHROMATOGRAPHY - PART 1: PUMPED SAMPLING
    EN 13779:2007 Ventilation for non-residential buildings - Performance requirements for ventilation and room-conditioning systems
    VDI 2083 Blatt 9.1:2006-12 Clean room technology - Compatibility with required cleanliness and surface cleanliness
    VDI 2083 Blatt 9:1991-09 (Draft) Clean room engineering; quality, production and distribution of superpurity water
    VDE 0300-1 : 2014 ELECTROSTATICS - PART 1: ELECTROSTATIC PHENOMENA - PRINCIPLES AND MEASUREMENTS (IEC/TR 61340-1:2012 + COR.:2013)
    EN 1081:1998 Resilient floor coverings - Determination of the electrical resistance
    DIN 50452-1:1995-11 TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - TEST METHOD FOR PARTICLE ANALYSIS IN LIQUIDS - PART 1: MICROSCOPIC DETERMINATION OF PARTICLES
    EN ISO 14644-6:2007 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 6: VOCABULARY
    ISO 16000-11:2006 Indoor air — Part 11: Determination of the emission of volatile organic compounds from building products and furnishing — Sampling, storage of samples and preparation of test specimens
    DIN IEC 61340-1 : DRAFT 2007 GUIDE TO THE PRINCIPLES OF ELECTROSTATIC PHENOMENA AND THEIR MEASUREMENT
    DIN EN ISO 4628-5:2016-07 Paints and varnishes - Evaluation of degradation of coatings - Designation of quantity and size of defects, and of intensity of uniform changes in appearance - Part 5: Assessment of degree of flaking (ISO 4628-5:2016)
    IEC TR 61340-1:2012 Electrostatics - Part 1: Electrostatic phenomena - Principles and measurements
    EN ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
    EN ISO 14644-9:2012 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012)
    VDI 2083 Blatt 18:2012-01 Cleanroom technology - Biocontamination control
    ISO 16000-6:2011 Indoor air Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID
    ISO 4628-2:2016 Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 2: Assessment of degree of blistering
    ISO 4628-7:2016 Paints and varnishes Evaluation of degradation of coatings Designation of quantity and size of defects, and of intensity of uniform changes in appearance Part 7: Assessment of degree of chalking by velvet method
    ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
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