SEMI D9 : 2003(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TERMINOLOGY FOR FPD SUBSTRATES
Superseded date
08-03-2021
Superseded by
Published date
12-01-2013
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Specifies terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical and mechanical properties of FPD substrates.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI D44 : 2006E | SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL |
| SEMI D25 : 2000E(R2006) | SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATE SHIPPING CASE |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI F51 : 2017 | GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY |
| SEMI D3 : 1991(R2009) | QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D40 : 2004 | TERMINOLOGY FOR FPD SUBSTRATE DEFLECTION |
| SEMI D49 : 2007 | SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION |
| SEMI D52 : 2008E | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID |
| SEMI D11 : 1995(R2009) | SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES |
| SEMI D48 : NOV 2007 | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL |
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D15 : 1996(R2003) | FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD |
| SEMI D5 : 1994(R2003) | STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D15 : 1996(R2003) | FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD |
| SEMI D3 : 1991(R2009) | QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D11 : 1995(R2009) | SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES |
| SEMI D12 : 1995(R2003) | SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES |
| SEMI D7 : 1994(R2003) | FPD GLASS SUBSTRATE SURFACE ROUGHNESS MEASUREMENT METHOD |
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