SEMI D9 : 2003(R2015)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TERMINOLOGY FOR FPD SUBSTRATES
08-03-2021
12-01-2013
Specifies terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical and mechanical properties of FPD substrates.
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